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White light interferometry on a silicon via
Description
The upper panel displays the detrended reflected intensity as a function of wavelength (500–600 nm) from white light interferometry on a silicon via, revealing oscillatory interference fringes due to thin-film reflections. The lower panel shows the Fourier transform magnitude spectrum in depth space, identifying the dominant peak corresponding to the via depth.
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#code#data available
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Creator
anonymous
Published
November 1, 2025
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