White Light Reflectance Interferometry (WLRI) intensity spectrum and corresponding Fast Fourier Transform (FFT) analysis.

Description

White Light Reflectance Interferometry (WLRI) intensity spectrum and corresponding Fast Fourier Transform (FFT) analysis used to determine the depth of a Through-Silicon Via (TSV). The left panel displays the optical interference signal captured within the 500 to 600 nm wavelength range. The right panel presents the spatial domain FFT magnitude spectrum, where the dominant peak clearly identifies the physical depth of the TSV structure in micrometers.

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